Micro beam MEMS sensor for micro gas chromatography

MEMS-Based Micro Gas Chromatography: Design, Fabrication and Characterization

Micro Gas Chromatography for Liquid Petroleum Gas's

For years, microGC analysis has been useful as a powerful tool for the fast and reliable analyses of natural gas and other gaseous matrices; but, it is yet to prove its capabilities for liquid samples. In this paper, we present a unique gasifying system for volatile liquid sample introduction in a microGC. The system has been tested with a wide range of different samples: liquefied gases (ethan...

Couple Stress Effect on Micro/Nanocantilever-based Capacitive Gas Sensor

Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...

A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure sensor and the slotted-quad-beam structure sensor are performed by theoretical modeling and finite...

MEMS Micro-vacuum Pump for Portable Gas Analyzers

There are many advantages to miniaturizing systems for chemical and biological analysis. Recent interest in this area has led to the cre ation of several research programs, including a Micro Gas Analyzer (MGA) project at MIT. The goal of this project is to develop an inexpensive, portable, real-time, and low-power approach for detect ing chemical and biological agents. Elements entering the MGA...